Processing Facilities
click the images to enlarge 360° panorama small - big	Class 1000 Cleanroom equipped with:
	Optical Lithography: Karl Suss MJB3 mask aligner 4" wafer - 1mm features routinely achieved.
	Metal deposition: RIAL EGE 450 electron beam evaporator ohmic contacts and deposition of metal layers on nanometric scale.
click here to enlarge.... and here to switch on the plasma	Dielectric films deposition SISTEC CVD 600 T The system is set up to grow SiO2, Si3N4 and stress controlled SiOxNy Rf power 500W gas available SiH4; NH3, N2O, N2 O2
	AFM and AFM lithography Veeco-Thermomicroscope Autoprobe CP research scan size 100mm, lithography software.

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